The MWLI^®-technology always should be applied when high precision distance or topology measurements are a task, but tactile measurements are not an option or just not desired, as they are slow or possibly could harm the object. Due to its large working distance and working range and the large absolute measurement range a whole bunch of new applications in industry and science become possible. While measurements on polished objects can be perfomed with nanometer precision the MWLI-technology also can be applied on slightly rough surfaces. The small probe of the sensor system allows an easy integration into industrial machines.
The mutliprobe system (simultaneous read of 2 to 5 probes) in conjunction with the large measurement range facilitates the installment of true and insitu reference measurements. Therewith, errors of axles in scanning systems can be determined and eliminated.

A few out of the manifold of the LuphoSmart - applications:

• Ultra precise adjustment of workpieces and
  machine parts (e.g. Ultraprecisionmanufacturing)
• Metrology of objects in the nanometer range
• Thickness of objects
• High precision measurement of roundness
• Determination of the concentric runout
  of airbearing stages

Determination of the position of a
workpiece in a diamond turning lathe

Determination of the position of the workpiece

Metrology of a structured
chrome covered substrate

Determination of the topology
of a gold covered lens

Determination of the topology
of a glass lens

The LuphoSmart - MWLI^®-technologie - in conjunction with a set of suited actuators - allows the determination of the topology of different objects down to the nanometer range. Here, high reflective polished objects as mirrors or metal coated substrates can be measured as well as transparent objects providing only weak reflectivity (glass lenses, substrate glases).
Consequently the LuphoSmart-MWLI^®-techology in multi-probe configuration resembles the core of the LuphoScan-metrology system.

Featuring the absulote measurement range it is possible to determine the hight of structures of up to 1mm hight on polished objects with a precision of +-5nm.

Chromium covered object
with 10 steps each of a
height of 50µm.

 

Topology error
of an aspheric lens.

Thickness measurement of objects
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Measurement of the thickness
of an optical lens

Using the LuphoSmart-two-probe-system the thickness of a polished object can be measured with nanometer precision. Positioning the probes contradirectional on either side of the object and utilizing the absolut measurement range the errors and inaccuracies of the scanning stages can be eliminated.

High precision measurement of roundness
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Determination of the roundness
of a steel sphere

The LuphoSmart-MWLI^®-technology especially is suited to investigate the roundness of polished objects or objects with a slight roughness. Due to the large working range and the possibility also to measure small steps the LuphoSmart system allows the measurement of objects with a large a excentricity or small grooves.

Measurement of concentricity
of air bearing turntables
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Measuerement of concentricity and
drunkenness with a
LuphoSmart - 5-probe-system

With a LuphoSmart-5-probe-system a nanometer precise determination of the concentricity and the drunkenness of air bearing turntables and axles is possible. With a working range of up to 1cm per probe the adjustment of the system is rather easy. Also the measurement of a rotation with large excentricity is possible. The long and flexible wiring and the small probes make a easy exchange of already exiting sensors-systems possible.

Result of a concentricity measurement
(karthesian and in polar coordinates)
 

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