Luphos

The MWLI^®-Method is based on the simultaneous evaluation of the phase information of two or more conjoint but separatly operated interferometers, measuring the same distance at the same time.

The correlation of the phase information of the different wavelengths results in an artificial wavelength that streches the range of non-ambiguousness to more than a thousand times of that of a simple interferometer. As the phase information of one single interferometer remains existent, also the accuracy of the measurement can be kept in the nanometer regime and below.

MWLI^® Method

The patended MWLI^® Measurement system, developed by Luphos, allows an ultra high precision measurement of distance and topology. The unique system combines many advantages of other distance measurement systems while omitting their disadvantages lie necessary contact or small woring distance and/or tiny working range.

Small and lightweight
The probe of the MWLI^® system is small and only a few gramms in weight. With its dimensions of 18 mm X 40 mm it is easily integrable into several applications.

Contactless
The MWLI^®-optical measurement principle allows for a contact-free measurement from rather large distance without a loss of accuracy. Measuring at a wavelength of about 1560nm with low intensity prevents a damage of sample.

Fast
Using a sampling frequency in the kHz region a dynamical measurement and scanning of the topology is possible.

Precise and absolut
The MWLI^®-principle allows a distance measurement with an accuracy of a nanometer within a range of unambiguousness of up to 2mm. Within this range a disruption of the measurement (like blocking the beam) or a discontinuation (like measuring a step profile) does not disrupt the measurement.

Large measurement range
Beyond the range of unambiguousness a continuous measurement is possible up to a distance of several centimeters. This allows for the measurement of objects with a large variation in height without following the surface-topology with the probe.

Measuring rough and polished surfaces
The MWLI^®-Method allows for measurements on rough as well as on polished surfaces. These can be done in a scanning movement with the same probe; no exchange of sensors is necessary.